JPH0639790Y2 - マスフローコントローラ - Google Patents

マスフローコントローラ

Info

Publication number
JPH0639790Y2
JPH0639790Y2 JP12267690U JP12267690U JPH0639790Y2 JP H0639790 Y2 JPH0639790 Y2 JP H0639790Y2 JP 12267690 U JP12267690 U JP 12267690U JP 12267690 U JP12267690 U JP 12267690U JP H0639790 Y2 JPH0639790 Y2 JP H0639790Y2
Authority
JP
Japan
Prior art keywords
mass flow
flow controller
bypass passage
flow rate
cover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP12267690U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0478389U (en]
Inventor
達也 中西
Original Assignee
関西日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 関西日本電気株式会社 filed Critical 関西日本電気株式会社
Priority to JP12267690U priority Critical patent/JPH0639790Y2/ja
Publication of JPH0478389U publication Critical patent/JPH0478389U/ja
Application granted granted Critical
Publication of JPH0639790Y2 publication Critical patent/JPH0639790Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Flow Control (AREA)
  • Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
  • Examining Or Testing Airtightness (AREA)
  • Pipe Accessories (AREA)
  • Pipeline Systems (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
JP12267690U 1990-11-22 1990-11-22 マスフローコントローラ Expired - Lifetime JPH0639790Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12267690U JPH0639790Y2 (ja) 1990-11-22 1990-11-22 マスフローコントローラ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12267690U JPH0639790Y2 (ja) 1990-11-22 1990-11-22 マスフローコントローラ

Publications (2)

Publication Number Publication Date
JPH0478389U JPH0478389U (en]) 1992-07-08
JPH0639790Y2 true JPH0639790Y2 (ja) 1994-10-19

Family

ID=31870437

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12267690U Expired - Lifetime JPH0639790Y2 (ja) 1990-11-22 1990-11-22 マスフローコントローラ

Country Status (1)

Country Link
JP (1) JPH0639790Y2 (en])

Also Published As

Publication number Publication date
JPH0478389U (en]) 1992-07-08

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